Minipleat filters

For the first time, TROX is producing a low-outgassing clean room filter with certified safety for the highest quality production safety in clean rooms, e.g. in the semiconductor industry.

All our cleanroom filters are classified according to the EN 1822 particle counting method. However, for certain specific applications, e.g. in the semiconductor industry, it is not enough to know the number of particles, but also the consistency of the particles.

Typically, volatile organic compounds (VOCs - Volatile Organic Compounds and SVOCs - Semi-Volatile Organic Compounds) are emitted from the materials used for the product: e.g. ammonia, sulphurous hydrocarbons, halogenated carbons, silicone compounds / siloxanes. 

TROX MFPCR cleanroom filters are made of low-outgassing materials, so that the above-mentioned substances only occur in very low concentrations and the filters are virtually free of them.

The Fraunhofer Institute has tested the outgassing behaviour of the TROX filter in accordance with ISO 14644-5: TROX is now the first company to be able to present the corresponding independent certificate: 

MFPCR series H14 Filter - Report TR 2408-1540

• Qualification certificate
• Statement of Qualification